All-reliable-condition ultraviolet lasers are already commonly used in the fields of mechanical flaw detection, lithography, micromachining and drugs for the benefits of tiny quantity, long life, significant effectiveness, very good beam high-quality, huge tuning and slim spectral line, etc. Employing significant energy in the vicinity of-infrared coherent light supply as the basic frequency supply based upon nonlinear tuning technological know-how, generating ultraviolet coherent radiation by multistage frequency conversion is thought to be an essential method to acquire the ultraviolet coherent light supply.

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We summarized The existing growth position from the significant-electrical power DUV laser the two in the wavelength of FHG of your one-μm laser and at 193 nm. The current enhancement in the reliable-state/fiber laser, along with the nonlinear optical crystals, prompts not merely the common power but also the beam excellent (coherence) of your DUV lasers to an unprecedented stage.

全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。

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From the scientific and industrial purposes, the beam quality in the DUV laser is additionally a significant parameter. Significantly, the beam high quality of the DUV laser radically influences the laser machining effects. The beam top quality from the DUV laser is determined by that of the basic laser and the crystal with the frequency conversion. Just lately, a large-power DUV laser (>10 W) at 258 nm was noted which has a beam good quality of M2 < 1.five, which was produced by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would bring about an improved laser machining result when compared to the preceding DUV lasers with larger sized M2.

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